ZL50 chiller
SEMI Chillers are primarily used for precise temperature control of process equipment in semiconductor (FAB) and FPD display manufacturing processes. They regulate temperature for equipment involved in etching, thin-film deposition, coating/developing, and similar processes (e.g., equipment from LAM, AMAT, TEL, NAURA, Aixtron, Veeco, AMEC).
A SEMI Chiller is a temperature control unit for industrial processes, mainly consisting of a liquid pump, heat exchanger, reservoir, refrigeration compressor, and control system.