ZC209-4D chiller
SEMI Chillers are primarily used for precise temperature control of process equipment in semiconductor (FAB) and FPD display manufacturing processes. They regulate temperature for equipment involved in etching, thin-film deposition, coating/developing, and similar processes (e.g., equipment from LAM, AMAT, TEL, NAURA, Aixtron, Veeco, AMEC).
A SEMI Chiller is a temperature control unit for industrial processes, mainly consisting of a liquid pump, heat exchanger, reservoir, refrigeration compressor, and control system.
Product details
Features:
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Advanced Control Technology: Fuzzy control and feedforward control ensure high temperature accuracy and excellent temperature tracking performance.
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Energy-Saving Technologies: Hot-Gas bypass and variable frequency drives (VFD) significantly reduce energy consumption.
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Advanced Sealing & Leak Detection: Dramatically minimizes leakage and volatilization of circulating fluid.
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Ultra-Low Temperature Technology: Single/multi-stage cascade refrigeration and multi-layer composite insulation enable temperature control as low as -100°C or below.
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Customization Support: Accommodates multi-channel and multi-type user-defined requirements.
| ZC209-4D Chiller | Specification | |||||
| Temperature range | -20 to +90℃ | |||||
| Temperature accuracy |
±0.1℃（Constant state） | |||||
| Cooling capacity |
-10℃@4Kw | |||||
| Coolant Type | Fluorinert/Galden/Dl-EG | |||||
| Heater capacity |
3Kw | |||||
| Flow | 25LPM@0.5Mpa | |||||
| Cooling method | Water cooled | |||||
| Coolant Port | 3/4” Rc or LOK | |||||
| Facility water Port | 1/2” Rc or LOK | |||||
| Power supply | 3-phase 208V±10% | |||||
For detailed specifications, please contact us!
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