ZH80 chiller - Temperature Forcing Systems-Chengdu ZongLen Technologies CO.,LTD

ZH80 chiller

SEMI Chillers are primarily used for precise temperature control of process equipment in semiconductor (FAB) and FPD display manufacturing processes. They regulate temperature for equipment involved in etching, thin-film deposition, coating/developing, and similar processes (e.g., equipment from LAM, AMAT, TEL, NAURA, Aixtron, Veeco, AMEC). A SEMI Chiller is a temperature control unit for industrial processes, mainly consisting of a liquid pump, heat exchanger, reservoir, refrigeration compressor, and control system.

Features:

Advanced Control Technology: Fuzzy control and feedforward control ensure high temperature accuracy and excellent temperature tracking performance.
Energy-Saving Technologies: Hot-Gas bypass and variable frequency drives (VFD) significantly reduce energy consumption.
Advanced Sealing & Leak Detection: Dramatically minimizes leakage and volatilization of circulating fluid.
Ultra-Low Temperature Technology: Single/multi-stage cascade refrigeration and multi-layer composite insulation enable temperature control as low as -100°C or below.
Customization Support: Accommodates multi-channel and multi-type user-defined requirements.

ZH80S Chiller		Specification
Temperature range		+30 to +90℃
Temperature accuracy		±0.1℃（Constant state）
Cooling capacity		PCW+10℃@8Kw
Coolant Type		Fluorinert/Galden/Dl
Heater capacity		6Kw
Flow		30LPM@0.5Mpa
Cooling method		Water cooled
Coolant Port		3/4” Rc or LOK
Facility water Port		1/2” Rc or LOK
Power supply		3-phase 208V±10%