ZC80 chiller - Temperature Forcing Systems-Chengdu ZongLen Technologies CO.,LTD

ZC80 chiller

ZC80 Temperature Controller SEMI Chiller Temperature Controller is mainly used for precise temperature control of process equipment in semiconductor (FAB) and FPD display processes, such as temperature control of etching/film/glue/development and other process equipment (such as LAM, AMAT, TEL, NAURA, Naura, Aixtron, Veeco, AMEC, etc.). The SEMI Chiller thermostat is a temperature control device in the process mainly composed of a liquid pump, a heat exchanger, a liquid storage tank, a refrigeration compressor, and a control system.

Features:

Advanced Control Technology: Fuzzy control and feedforward control ensure high temperature accuracy and excellent temperature tracking performance.
Energy-Saving Technologies: Hot-Gas bypass and variable frequency drives (VFD) significantly reduce energy consumption.
Advanced Sealing & Leak Detection: Dramatically minimizes leakage and volatilization of circulating fluid.
Ultra-Low Temperature Technology: Single/multi-stage cascade refrigeration and multi-layer composite insulation enable temperature control as low as -100°C or below.
Customization Support: Accommodates multi-channel and multi-type user-defined requirements.

ZC80S Chiller		Specification
Temperature range		-20 to +90℃
Temperature accuracy		±0.1℃（Constant state）
Cooling capacity		-10℃@8Kw
Coolant Type		Fluorinert/Galden/Dl-EG
Heater capacity		4Kw
Flow		25LPM@0.5Mpa
Cooling method		Water cooled
Coolant Port		3/4” Rc or LOK
Facility water Port		1/2” Rc or LOK
Power supply		3-phase 208V±10%