ZU35 chiller - Temperature Forcing Systems-Chengdu ZongLen Technologies CO.,LTD

ZU35 chiller

SEMI Chillers are primarily used for precise temperature control of process equipment in semiconductor (FAB) and FPD display manufacturing processes. They regulate temperature for equipment involved in etching, thin-film deposition, coating/developing, and similar processes (e.g., equipment from LAM, AMAT, TEL, NAURA, Aixtron, Veeco, AMEC). A SEMI Chiller is a temperature control unit for industrial processes, mainly consisting of a liquid pump, heat exchanger, reservoir, refrigeration compressor, and control system.

Product details

Features:

Advanced Control Technology: Fuzzy control and feedforward control ensure high temperature accuracy and excellent temperature tracking performance.
Energy-Saving Technologies: Hot-Gas bypass and variable frequency drives (VFD) significantly reduce energy consumption.
Advanced Sealing & Leak Detection: Dramatically minimizes leakage and volatilization of circulating fluid.
Ultra-Low Temperature Technology: Single/multi-stage cascade refrigeration and multi-layer composite insulation enable temperature control as low as -100°C or below.
Customization Support: Accommodates multi-channel and multi-type user-defined requirements.

ZU35S Chiller		Specification
Temperature range		-80 to +40℃
Temperature accuracy		±0.1℃（Constant state）
Cooling capacity		-80℃@3.5Kw
Heater capacity		3Kw
Flow		20LPM@0.5Mpa
Cooling method		Water cooled
Coolant Port		3/4” Rc
Facility water Port		1/2” Rc
Power supply		3-phase 208V or 400V ±10%